*¸¦µæÀ®²Ì 2005ǯ [#ye92c499] **ÏÀʸ¡¦¥×¥í¥·¡¼¥Ç¥£¥ó¥°¥¹ [#c6030797] ***ººÆÉÉÕ¤ [#aa2cf555] -M. Yoshida, K. Hiraka, H. Ohta, Y. Fujiwara, A. Koizumi and Y. Takeda:&br; "Electron spin resonance study of Zn-codoping effect on local structure of the Er-related centers in GaAs:Er,O"&br; Journal of Applied Physics ''97''(2) (2005) pp. 023909-1-4. -Z. Zhou, N. Sato, T. Komaki, A. Koizumi, T. Komori, M. Morinaga, Y. Fujiwara and Y. Takeda:&br; "Effects of S-doping and subsequent annealing on photoluminescence around 1.54 µm from Er-containing ZnO"&br; Materials Science Forum ''475-479'' (2005) pp. 1125-1128. -M. Yoshida, K. Hiraka, H. Ohta, A. Koizumi, Y. Fujiwara and Y. Takeda:&br; "ESR study of Zn codoping effect on the luminescence efficiency of the Er-2O center in GaAs:Er,O"&br; Physics of Semiconductors, AIP Conference Proceedings, Vol. 772, edited by J. Menendez and C. G. Van de Walle (AIP, New York, 2005) pp.121-122. -M. Suzuki, M. Tonouchi, A. Koizumi, Y. Takeda, K. Nakamura and Y. Fujiwara:&br; "Terahertz radiation from Er,O-codoped GaAs surface"&br; Physics of Semiconductors, AIP Conference Proceedings, Vol. 772, edited by J. Menendez and C. G. Van de Walle (AIP, New York, 2005) pp. 131-132. -Y. Fujiwara, K. Nakamura, A. Koizumi, Y. Takeda, M. Suzuki and M. Tonouchi:&br; "Pump and probe reflection study on photoexcited carrier dynamics in Er,O-codoped GaAs"&br; Physics of Semiconductors, AIP Conference Proceedings, Vol. 772, edited by J. Menendez and C. G. Van de Walle (AIP, New York, 2005) pp. 139-140. -Y. Fujiwara, K. Nakamura, S. Takemoto, Y. Terai, M. Suzuki, A. Koizumi, Y. Takeda and M. Tonouchi:&br; "Nonequilibrium carrier dynamics studied in Er,O-codoped GaAs by pump-probe reflection technique"&br; Materials Research Society Symposium Proceedings, Rare-Earth Doping for Optoelectronic Applications, edited by T. Gregorkiewicz, Y. Fujiwara, M. Lipson and J. M. Zavada (Materials Research Society, Pittsburgh, 2005) pp. 79-83. -Y. Fujiwara:&br; "Room-temperature operation of injection-type 1.5 µm light-emitting diodes with Er,O-codoped GaAs"&br; Materials Transactions ''46''(9) (2005) pp. 1969-1974. -Y. Fujiwara, A. Koizumi, K. Nakamura, M. Suzuki, Y. Takeda and M. Tonouchi:&br; "Behaviors of nonequilibrium carriers in Er,O-codoped GaAs for 1.5 µm light-emitting devices with extremely stable wavelength"&br; Materials Science Forum ''512'' (2005) pp. 159-164. ***ººÆɤʤ· [#h3a0b8c1] -Y. Terai, Y. Maeda, K. Akiyama and Y. Fujiwara: "Investigation of β-FeSi&subsc{2};/Si heterostructures by photoluminescence with different optical configurations" Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials (SSDM2005, Kobe, Japan, September 13-15, 2005) pp. 330-331. **¹ñºÝ²ñµÄȯɽ [#gf4a4c1f] -Y. Fujiwara, K. Nakamura, S. Takemoto, A. Koizumi, M. Suzuki, Y. Takeda and M. Tonouchi:&br; "Nonequilibrium carrier dynamics studied in Er,O-codoped GaAs by pump-probe reflection technique"&br; 2005 Materials Research Society Spring Meeting, San Francisco, USA, ''V3.7'', March 28-April 1 (2005). -Y. Fujiwara, T. Tokuno, H. Ichida, A. Koizumi, Y. Takeda and Y. Kanematsu:&br; "Excitation cross section of Er-2O luminescent center in Er,O-codoped GaAs grown by organometallic vapor phase epitaxy"&br; 2005 European Materials Research Society Spring Meeting, ''C-I.02'', Strasbourg, France, May 31-June 3 (2005). -A. Mishina, T. Akahori, I. Yamauchi and Y. Fujiwara:&br; "Growth of bulk b-FeSi2 crystals by annealing of well aligned solidification structures"&br; 23rd International Conference on Defects in Semiconductors, Awaji Island, Japan, ''TuP.43'', July 25-29 (2005). -Y. Terai, Y. Maeda and Y. Fujiwara:&br; "Photoluminescence enhancement of beta-FeSi2 crystals by optimizing Al doping concentration"&br; 23rd International Conference on Defects in Semiconductors, Awaji Island, Japan, ''TuP.70'', July 25-29 (2005). -K. Nakamura, S. Takemoto, Y. Terai, M. Suzuki, A. Koizumi, Y. Takeda, M. Tonouchi and Y. Fujiwara:&br; "Direct observation of trapping of photoexcited carriers in Er,O-codoped GaAs"&br; 23rd International Conference on Defects in Semiconductors, Awaji Island, Japan, ''WeM2.2C'', July 25-29 (2005). -K. Yamaoka, Y. Yoshizako, H. Kato, D. Tsukiyama, Y. Terai and Y. Fujiwara:&br; "Room-temperature plasma-enhanced chemical vapor deposition of stable SiOCH films using tetraethoxysilane"&br; 23rd International Conference on Defects in Semiconductors, Awaji Island, Japan, ''ThP.5'', July 25-29 (2005). -Y. Fujiwara, M. Yoshida, T. Terao, A. Koizumi, H. Ohta, Y. Takeda and N. Fujimura:&br; "Anomalous magnetic behaviors of Er ions in Er,O-codoped GaAs"&br; Third International School and Conference on Spintronics and Quantum Information Technology (Spintech III), Awaji Island, Japan, ''P12'', August 1-5 (2005). -Y. Terai, Y. Maeda, K. Akiyama and Y. Fujiwara:&br; "Investigation of b-FeSi2/Si heterostructures by photoluminescence with different optical configurations"&br; 2005 International Conference on Solid State Devices and Materials (SSDM2005), ''E-4-3'', Kobe, Japan, September 13-15 (2005). **¹ñÆâ²ñµÄȯɽ [#ne36f87d] -Ãæ¼°ìɧ¡¢ÃÝËܾ±°ì¡¢»û°æ·ÄÏ¡¢ÎëÌÚÀµ¿Í¡¢¾®Àô½ß¡¢ÃÝÅÄÈþÏ¡¢ÅÍÆâÀ¯µÈ¡¢Æ£¸¶¹¯Ê¸¡§&br; "Er,O¶¦Åº²ÃGaAs¤Ë¤ª¤±¤ë¸÷Î嵯¥¥ã¥ê¥¢¤Î´ËÏÂ¥×¥í¥»¥¹"&br; Âè52²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢''31p-T-10''¡¢ºë¶ÌÂç³Ø¡¢¤µ¤¤¤¿¤Þ»Ô¡¢3·î30Æü (2005). -»°ÉÊÌÀÀ¸¡¢ÀÖËÙͧɧ¡¢»³Æâͦ¡¢Æ£¸¶¹¯Ê¸¡§&br; "À°Îó¶Å¸ÇÁÈ¿¥¤òÍøÍѤ·¤¿¥Ð¥ë¥¯b-FeSi2¤ÎºîÀ½¤ÈÊý°Ì²òÀÏ"&br; Âè52²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢''31p-YC-12''¡¢ºë¶ÌÂç³Ø¡¢¤µ¤¤¤¿¤Þ»Ô¡¢3·î30Æü (2005). -»ÔÅĽ¨¼ù¡¢ÆÁÌî¹äÂç¡¢¾®Àô½ß¡¢ÃÝÅÄÈþÏ¡¢·ó¾¾ÂÙÃË¡¢Æ£¸¶¹¯Ê¸¡§&br; "Er,O¶¦Åº²ÃGaAs¤Ë¤ª¤±¤ëEr¸÷Î嵯ÃÇÌÌÀѤÎɾ²Á"&br; Âè52²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢31p-T-11¡¢ºë¶ÌÂç³Ø¡¢¤µ¤¤¤¿¤Þ»Ô¡¢3·î30Æü (2005). -»°ÉÊÌÀÀ¸¡¢»û°æ·ÄÏ¡¢»³Æâͦ¡¢Æ£¸¶¹¯Ê¸¡§&br; "ÊñÀÏÈ¿±þ¤Ë¤è¤ëβ-FeSi&subsc{2};ñ·ë¾½¤ÎÀ®Ä¹½é´ü²áÄø"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢''10a-S-7''¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î10Æü (2005). -»û°æ·ÄÏ¡¢Á°ÅIJ¶ѡ¢½©»³¸Ê塢ƣ¸¶¹¯Ê¸¡§&br; "Cu¤ÎÇ®³È»¶¤Ë¤è¤ëβ-FeSi&subsc{2};¤Îȯ¸÷¥¹¥Ú¥¯¥È¥ëÊѲ½"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢10p-S-1¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î10Æü (2005). -ÃÝËܾ±°ì¡¢Ãæ¼°ìɧ¡¢»û°æ·ÄÏ¡¢ÎëÌÚÀµ¿Í¡¢¾®Àô½ß¡¢ÃÝÅÄÈþÏ¡¢ÅÍÆâÀ¯µÈ¡¢Æ£¸¶¹¯Ê¸¡§&br; "Er,O¶¦Åº²ÃGaAs¤Ë¤ª¤±¤ë¸÷Î嵯¥¥ã¥ê¥¢¤Î´ËϤȥ¨¥Í¥ë¥®¡¼Í¢Á÷"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢9a-K-4¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î7Æü (2005). -ÆÁÌî¹äÂç¡¢»ÔÅĽ¨¼ù¡¢»û°æ·ÄÏ¡¢¾®Àô½ß¡¢ÃÝÅÄÈþÏ¡¢·ó¾¾ÂÙÃË¡¢Æ£¸¶¹¯Ê¸¡§&br; "Er,O¶¦Åº²ÃGaAs¤Ë¤ª¤±¤ëEr¸÷Î嵯ÃÇÌÌÀѤÎÍÞÀ©µ¡¹½"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢9a-K-3¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î7Æü (2005). -ÃÛ»³ÂçÊå¡¢»³²¬·ÄÍ´¡¢²ÃÆ£±ÑÌÀ¡¢µÈÇ÷͵»Ê¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§&br; "TEOS¤òÍѤ¤¤¿¥ê¥â¡¼¥È¥×¥é¥º¥ÞCVDË¡¤Ë¤è¤ëSiOCHËì¤Î¼¼²¹À®Ëì"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢11a-M-6¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î7Æü (2005). -»³²¬·ÄÍ´¡¢µÈÇ÷͵»Ê¡¢²ÃÆ£±ÑÌÀ¡¢ÃÛ»³ÂçÊå¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§&br; "TEOS¤òÍѤ¤¤ÆºîÀ½¤·¤¿SiOCHËì¤Ë´Þ¤Þ¤ì¤ëú²½¿åÁÇ´ð¤ÎǮŪ°ÂÄêÀ"&br; Âè65²ó±þÍÑʪÍý³Ø´Ø·¸Ï¢¹ç¹Ö±é²ñ¡¢11a-M-7¡¢ÆÁÅçÂç³Ø¡¢ÆÁÅç»Ô¡¢9·î7Æü (2005). -Ê¿¾¾Î´¡¢Æü¹â·½Æó¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§&br; "OMVPEË¡¤Ë¤è¤ëInGaP/GaAs¥Ø¥Æ¥í³¦Ì̤κîÀ½¤È¤½¤Îɾ²Á"&br; ÆüËܶⰳزñ2005ǯ½©´ü¡ÊÂè137²ó¡ËÂç²ñ¡¢''965''¡¢¹ÅçÂç³Ø¡¢Åì¹Åç»Ô¡¢9·î28Æü (2005). -Æü¹â·½Æó¡¢Ê¿¾¾Î´¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§ "OMVPEË¡¤Ë¤è¤ëúÁǥɡ¼¥×GaAs¤ÎÄã²¹À®Ä¹¤ÈÅŵ¤ÅªÉ¾²Á"&br; ÆüËܶⰳزñ2004ǯ½©´ü¡ÊÂè137²ó¡ËÂç²ñ¡¢''968''¡¢¹ÅçÂç³Ø¡¢Åì¹Åç»Ô¡¢9·î28Æü (2005). **¸¦µæ²ñ [#t69b98fd] -Æ£¸¶¹¯Ê¸¡¢Æ£Â¼µªÊ¸¡¢ÂÀÅĿΡ¢ÂçÞ¼ÇîÀë¡¢ÅÍÆâÀ¯µÈ¡¢Çò°æ¸÷±À¡§&br; "´õÅÚÎีÁÇź²ÃȾƳÂΤο·Å¸³«¡§Ãá½øÀ©¸æ¤Ë¤è¤ë¿·¤·¤¤¥¹¥Ô¥óʪÀ¤Îȯ¸½"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡ÖȾƳÂΥʥΥ¹¥Ô¥ó¥È¥í¥Ë¥¯¥¹¡×Ê¿À®16ǯÅÙ¸¦µæÀ®²ÌÊó¹ð²ñ¡¢Åìµþ¹©¶ÈÂç³ØɴǯµÇ°´Û¡¢ÅìµþÅÔÌܹõ¶è¡¢1·î27, 28Æü (2005). -Æ£¸¶¹¯Ê¸¡¢»û°æ·ÄÏ¡¢·ó¾¾ÂÙÃË¡¢»ÔÅĽ¨¼ù¡¢ÅÍÆâÀ¯µÈ¡¢ÎëÌÚÀµ¿Í¡§&br; "ÇÈĹĶ°ÂÄê¸÷¸»ÍѺàÎÁ¡§Er,O¶¦Åº²ÃGaAs¤Ë¤ª¤±¤ëEr¸÷Î嵯ÃÇÌÌÀѤÎɾ²Á"&br; 2004ǯÅÙÂçºåÂç³ØÀèü²Ê³Ø¥¤¥Î¥Ù¡¼¥·¥ç¥ó¥»¥ó¥¿¡¼VBLÉôÌç¸ø³«À®²Ìȯɽ²ñ¡¢ÂçºåÂç³ØÀèü²Ê³Ø¥¤¥Î¥Ù¡¼¥·¥ç¥ó¥»¥ó¥¿¡¼¡¢¿áÅĻԡ¢3·î3Æü (2005). -Æ£¸¶¹¯Ê¸¡§&br; "¸¶»Ò¥ì¥Ù¥ëÀ©¸æ¤Ë¤è¤ë¿·µ¬Î̻ҵ¡Ç½ºàÎÁ¤ÎÁÏÀ½"&br; 21À¤µªCOE¥×¥í¥°¥é¥à¡Ö¹½Â¤¡¦µ¡Ç½Àè¿ÊºàÎÁ¥Ç¥¶¥¤¥ó¸¦µæµòÅÀ¤Î·ÁÀ®¡×Âè3²ó¥·¥ó¥Ý¥¸¥¦¥à¡¢ÂçºåÂç³Ø¶ä°É²ñ´Û¡¢¿áÅĻԡ¢3·î6Æü (2005). -Æ£¸¶¹¯Ê¸¡¢Æ£Â¼µªÊ¸¡¢ÂÀÅĿΡ¢ÂçÞ¼ÇîÀë¡¢ÅÍÆâÀ¯µÈ¡¢Çò°æ¸÷±À¡§&br; "´õÅÚÎีÁÇź²ÃȾƳÂΤο·Å¸³«¡§Ãá½øÀ©¸æ¤Ë¤è¤ë¿·¤·¤¤¥¹¥Ô¥óʪÀ¤Îȯ¸½"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡ÖȾƳÂΥʥΥ¹¥Ô¥ó¥È¥í¥Ë¥¯¥¹¡×Ê¿À®17ǯÅٲƤ覵æ²ñ¡¢ÅìËÌÂç³ØÅŵ¤ÄÌ¿®¸¦µæ½ê¡¢ÀçÂæ»Ô¡¢6·î8-9Æü (2005). -Æ£¸¶¹¯Ê¸¡¢»û°æ·ÄÏ¡¢ÅÍÆâÀ¯µÈ¡¢»ÔÅĽ¨¼ù¡§&br; "´õÅÚÎàź²ÃȾƳÂΤÎÃá½øÀ©¸æ¤È¹â¼¡È¯¸÷µ¡Ç½¤Îȯ¸½"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡Ö´õÅÚÎà·ÁÂÖÀ©¸æ¡×Ê¿À®17ǯÅÙ¥¹¥¿¡¼¥È¥¢¥Ã¥×¸¦µæ²ñ¡¢·§ËÜÂç³Ø¡¢·§Ëܻԡ¢6·î20-21Æü (2005). -S. Takemoto, K. Nakamura, Y. Terai, M. Suzuki, A. Koizumi, Y. Takeda, M. Tonouchi and Y. Fujiwara:&br; "Ultrafast trapping processes of photoexcited carriers in Er,O-codoped GaAs"&br; 24th Electronic Materials Symposium, ''I4'', pp. 191-192¡¢¥á¥ë¥Ñ¥ë¥¯¾¾»³¡¢¾¾»³»Ô¡¢7·î4-6Æü (2005). -K. Yamaoka, Y. Yoshizako, H. Kato, D. Tsukiyama, Y. Terai and Y. Fujiwara:&br; "Plasma-enhanced chemical vapor deposition of SiOCH films at room temperature using TEOS"&br; 24th Electronic Materials Symposium, ''G12'', pp. 157-158¡¢¥á¥ë¥Ñ¥ë¥¯¾¾»³¡¢¾¾»³»Ô¡¢7·î4-6Æü (2005). -»°ÉÊÌÀÀ¸¡¢»û°æ·ÄÏ¡¢»³Æâͦ¡¢Æ£¸¶¹¯Ê¸¡§&br; "ÊñÀÏÈ¿±þ¤Ë¤è¤ë¥Ð¥ë¥¯β-FeSi&subsc{2};¤Î·ë¾½À¸À®"&br; Âè9²ó¥·¥ê¥µ¥¤¥É·ÏȾƳÂβƤγع»¡¢Åò²Ï¸¶ ËüÍÕÁñ¡¢¿ÀÆàÀÂÊÁ²¼·´¡¢7·î30Æü (2005). -Æ£¸¶¹¯Ê¸¡§&br; "´õÅÚÎàź²ÃȾƳÂΤÎÃá½øÀ©¸æ¤È£Å£Ìµ¡Ç½"&br; ¥»¥ß¥Ê¡¼¡Ö̵µ¡£Å£Ì¥Ç¥Ð¥¤¥¹¤Î´ðÁäȱþÍѡס¢¡Ê³ô¡Ë¥¯¥é¥ì¤Ä¤¯¤Ð¸¦µæ½ê¡¢¤Ä¤¯¤Ð»Ô¡¢8·î31Æü (2005). -»ÔÅĽ¨¼ù¡¢·ó¾¾ÂÙÃË¡¢ÆÁÌî¹äÂç¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡¢¾®Àô½ß¡¢ÃÝÅÄÈþÏ¡§&br; "´õÅÚÎàź²ÃȾƳÂÎGaAs:Er,O¤Ë¤ª¤±¤ëEr¸÷Î嵯ÃÇÌÌÀÑ"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡Ö´õÅÚÎà·ÁÂÖÀ©¸æ¡×Ê¿À®17ǯÅÙ´õÅÚÎà¼ã¼ê¸¦µæȯɽ²ñ, ''O1-4''¡¢¾¾Åç¥Û¥Æ¥ëÂç´ÑÁñ¡¢µÜ¾ë¸©µÜ¾ë·´¡¢9·î15Æü (2005). -Æ£¸¶¹¯Ê¸¡§&br; "¥Õ¥©¥È¥ë¥ß¥Í¥Ã¥»¥ó¥¹Ë¡"&br; ±þÍÑʪÍý³Ø²ñÅ쳤»ÙÉôÂè7²ó´ðÁÃ¥»¥ß¥Ê¡¼¡ÖÇöËì¤Îɾ²Áµ»½Ñ¡×, pp. 79-87¡¢Ì¾¸Å²°¹©¶ÈÂç³Ø¡¢Ì¾¸Å²°»Ô¡¢9·î29-30Æü (2005). -Æ£¸¶¹¯Ê¸¡¢»û°æ·ÄÏ¡¢ÅÍÆâÀ¯µÈ¡¢»ÔÅĽ¨¼ù¡§&br; "´õÅÚÎàź²ÃȾƳÂΤÎÃá½øÀ©¸æ¤È¹â¼¡È¯¸÷µ¡Ç½¤Îȯ¸½"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡Ö´õÅÚÎà·ÁÂÖÀ©¸æ¡×Ê¿À®17ǯÅÙÁ´ÂβñµÄ¡¢½çŷƲÂç³Ø¡¢ÅìµþÅÔÀéÂåÅĶ衢11·î19Æü (2005). -Æ£¸¶¹¯Ê¸¡¢»û°æ·ÄÏ¡¢ÅÍÆâÀ¯µÈ¡¢»ÔÅĽ¨¼ù¡§&br; "´õÅÚÎàź²ÃȾƳÂΤÎÃá½øÀ©¸æ¤È¹â¼¡È¯¸÷µ¡Ç½¤Îȯ¸½"&br; ʸÉô²Ê³Ø¾Ê²Ê³Ø¸¦µæÈñÊä½õ¶âÆÃÄêÎΰ踦µæ¡Ö´õÅÚÎà·ÁÂÖÀ©¸æ¡×Ê¿À®£±£·Ç¯ÅÙA03ÈɲñµÄ¡¢Âçºå»ÔΩÂç³Ø¡¢Âçºå»Ô¡¢12·î3Æü (2005). -µÈÇ÷͵»Ê¡¢»³²¬·ÄÍ´¡¢²ÃÆ£±ÑÌÀ¡¢ÃÛ»³ÂçÊå¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§&br; "PECVD¤Ë¤è¤ëSi·Ï»À²½Ëì¤Î¼¼²¹À®Ëì¤È¥×¥é¥º¥Þ¿ÇÃÇ/Plasma diagnosis of PECVD for the SiOCH deposition at room temperature"&br; Âè16²óÆüËÜMRS³Ø½Ñ¥·¥ó¥Ý¥¸¥¦¥à, ''H1-P02-D''¡¢ÆüËÜÂç³Ø¡¢ÅìµþÅÔÀéÂåÅĶ衢12·î10Æü (2005). -»³²¬·ÄÍ´¡¢µÈÇ÷͵»Ê¡¢²ÃÆ£±ÑÌÀ¡¢ÃÛ»³ÂçÊå¡¢»û°æ·ÄÏ¡¢Æ£¸¶¹¯Ê¸¡§&br; "TEOS¤òÍѤ¤¤¿¥×¥é¥º¥ÞCVDË¡¤Ë¤è¤ê¼¼²¹ºîÀ½¤·¤¿SiOCHËì¤Î¹½Â¤¤ª¤è¤ÓÅŵ¤ÅªÉ¾²Á/Structural and electrical properties of SiOCH films deposited by room-temperature PECVD using TEOS"&br; Âè16²óÆüËÜMRS³Ø½Ñ¥·¥ó¥Ý¥¸¥¦¥à, ''H1-O02-M''¡¢ÆüËÜÂç³Ø¡¢ÅìµþÅÔÀéÂåÅĶ衢12·î10Æü (2005). **Ãø½ñ [#v3364cec] -Æ£¸¶¹¯Ê¸:&br; "LED¤ÎÎô²½¤òËɤ°¤Ë¤Ï¡©¡ÊÂ裷¾Ï¡¿Â裱Àá¡Ë"&br; ¡ÖLEDºÇ¿·µ»½ÑÆ°¸þ¡ÁÀǽ¸þ¾å¡¦²ÝÂê²ò·è½¸¡Á¡×¡¢¡Ê³ô¡Ë¾ðÊ󵡹½ (2005) pp. 123-132. -T. Gregorkiewicz, Y. Fujiwara, M. Lipson and J. M. Zavada:&br; Materials Research Society Symposium Proceedings, Rare-Earth Doping for Optoelectronic Applications, Vol. 866 (Materials Research Society, Pittsburgh, 2005). **Æõö [#cd151001] -Æ£¸¶¹¯Ê¸¡¢»û°æ·ÄÏ¡¢µÈÇ÷͵»Ê¡¢»³²¬·ÄÍ´¡¢ÃÛ»³ÂçÊå¡¢²ÃÆ£±ÑÌÀ¡§&br; "SiOCHËì¤ÎÀ½Â¤ÊýË¡¤ª¤è¤Ó¥×¥é¥º¥ÞCVDÁõÃÖ¡¢Ê¤ӤËSiOCHËì"&br; ¡Ú¹ñÆâ½Ð´êÈÖ¹æ¡ÛÆôê2005-192373&br; ¡Ú¹ñÆâ½Ð´êÆü¡ÛÊ¿À®17ǯ¡Ê2005¡Ë6·î30Æü&br; ¡Ú¹ñºÝ½Ð´êÈÖ¹æ¡ÛPCT/JP2006/311321&br; ¡Ú¹ñºÝ½Ð´êÆü¡ÛÊ¿À®18ǯ¡Ê2006¡Ë6·î6Æü